Fabrication of Integrated Electrode for pH Sensor Application

• Published in: 2021 IEEE International Conference on Sensors and Nanotechnology (SENNANO) pp. 33 - 36
• Main Authors: Mohd Akhir, Farehanim Syukhairiyah, Kai Loong, Foo, Jin, Tan Soo, Hashim, Uda, Voon, Chun Hong, Azman Abu Hassan, Mohamad
• Format: Conference Proceeding
• Language: English
• Published: IEEE 22-09-2021
• Subjects: conventional photolithography; Current measurement; electrical characterization; Electrodes; integrated electrode; Lithography; Optical device fabrication; Optical microscopy; Optical sensors; pH sensor; Scanning electron microscopy
• DOI: 10.1109/SENNANO51750.2021.9642499

Integrated Electrode (IDEs), as a sensor, is a pervasive device in modern electronics and future hopes for producing a highly sensitive and selective sensor. In this work, a simple method of conventional photolithography for the fabrication of interdigitated electrodes is presented in detail. The structural of highly uniform IDEs device was optically characterized using high power microscope (HPM) and scanning electron microscope (SEM). Besides, the fabricated IDEs device was undergone electrical measurement with different pH. The result shows the highest current at 96 nA when the IDEs was tested with pH 10. Overall, our study establishes a correlation between structural and electrical properties of Al IDEs thin films with different pH