Interlayer grating coupler for Si/SiO2/SiN platform
We design a low insertion loss (1.9 dB) and wideband (3-dB bandwidth of 50 nm) interlayer grating coupler for the Si/SiO 2 /SiN platform. Measured performance of the fabricated device agrees well with the theoretically predicted results.
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Published in: | 2014 IEEE Photonics Conference pp. 603 - 604 |
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Main Authors: | , , , |
Format: | Conference Proceeding |
Language: | English |
Published: |
IEEE
01-12-2014
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Subjects: | |
Online Access: | Get full text |
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Summary: | We design a low insertion loss (1.9 dB) and wideband (3-dB bandwidth of 50 nm) interlayer grating coupler for the Si/SiO 2 /SiN platform. Measured performance of the fabricated device agrees well with the theoretically predicted results. |
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ISSN: | 1092-8081 2766-1733 |
DOI: | 10.1109/IPCon.2014.6995264 |