Modeling and design aspects of the MEMS switch

Modeling and design aspects of the MEMS switch

In this paper, some aspects regarding the mechanical as well as electrical modeling of the MEMS switch, are presented. A general formula for the spring constant is proposed, in order to take into consideration the real distribution of the electrostatic force along the bridge MEMS. This formula may b...

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Bibliographic Details
Published in:2003 International Semiconductor Conference. CAS 2003 Proceedings (IEEE Cat. No.03TH8676) Vol. 1; pp. 125 - 128 Vol. 1
Main Author: Simion, S.
Format: Conference Proceeding
Language:English
Published: IEEE 2003
Subjects:
Bridge circuits
Coplanar waveguides
Dielectrics
Electrostatics
Geometry
Micromechanical devices
Microswitches
Springs
Switches
Voltage
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Summary:In this paper, some aspects regarding the mechanical as well as electrical modeling of the MEMS switch, are presented. A general formula for the spring constant is proposed, in order to take into consideration the real distribution of the electrostatic force along the bridge MEMS. This formula may be used for a better mechanical analysis, but also for a better electrical analysis of the MEMS switch. The influence of the value for the applied voltage on the MEMS bridge is also numerically analyzed, for two geometries of the device. Also, a numerically analysis of a switch consisting of an array of MEMS switches is also presented, in order to estimate the effect of the MEMS switch series inductance.
ISBN:9780780378216
0780378210
DOI:10.1109/SMICND.2003.1251360