High frequency torsional MEMS scanner for displays

High frequency torsional MEMS scanner for displays

A high frequency resonant torsional microscanner actuated with thin film PZT is modeled, fabricated, and characterized. Sinusoidal actuation with 24 V at a mechanical resonance frequency of 39870 Hz provides a total optical scan angle of 38.5 deg. for the 1.4 mm wide mirror. It provides significant...

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Bibliographic Details
Published in:2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) pp. 636 - 639
Main Authors: Baran, U., Brown, D., Holmstrom, S., Balma, D., Davis, W. O., Mazzalai, A., Muralt, P., Urey, H.
Format: Conference Proceeding
Language:English
Published: IEEE 01-01-2012
Subjects:
Micromechanical devices
Mirrors
Optical device fabrication
Optical films
Optical imaging
Optical sensors
Resonant frequency
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Summary:A high frequency resonant torsional microscanner actuated with thin film PZT is modeled, fabricated, and characterized. Sinusoidal actuation with 24 V at a mechanical resonance frequency of 39870 Hz provides a total optical scan angle of 38.5 deg. for the 1.4 mm wide mirror. It provides significant power and size advantages compared to electromagnetically and electrostatically actuated scanners. This scanner is a significant step towards achieving full HD resolution with mobile laser projectors.
ISBN:9781467303248
1467303240
ISSN:1084-6999
DOI:10.1109/MEMSYS.2012.6170191