Low noise EUV generation via a femtosecond enhancement cavity

Using a femtosecond enhancement cavity in combination with high harmonic generation, we generate EUV radiation out to 61 nm at high (50 MHz) repetition rates with extremely low amplitude noise.

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Bibliographic Details
Published in:	CLEO/QELS: 2010 Laser Science to Photonic Applications pp. 1 - 2
Main Authors:	Mills, Arthur K, Hammond, T J, Stead, Rob, Jones, David J
Format:	Conference Proceeding
Language:	English
Published:	IEEE 01-05-2010
Subjects:	(120.0120) Instrumentation (140.4050) Mode-locked lasers (140.4780) Optical resonators (320.7090) Ultrafast lasers and metrology Laser mode locking Laser noise measurement Noise generators Noise level Nonlinear optics Optical harmonic generation Optical pulses Optical resonators Ultrafast optics Ultraviolet sources
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Abstract	Using a femtosecond enhancement cavity in combination with high harmonic generation, we generate EUV radiation out to 61 nm at high (50 MHz) repetition rates with extremely low amplitude noise.
AbstractList	Using a femtosecond enhancement cavity in combination with high harmonic generation, we generate EUV radiation out to 61 nm at high (50 MHz) repetition rates with extremely low amplitude noise.
Author	Hammond, T J Jones, David J Mills, Arthur K Stead, Rob
Author_xml	– sequence: 1 givenname: Arthur K surname: Mills fullname: Mills, Arthur K organization: Dept. of Phys. & Astron., Univ. of British Columbia, Vancouver, BC, Canada – sequence: 2 givenname: T J surname: Hammond fullname: Hammond, T J organization: Dept. of Phys. & Astron., Univ. of British Columbia, Vancouver, BC, Canada – sequence: 3 givenname: Rob surname: Stead fullname: Stead, Rob organization: Dept. of Phys. & Astron., Univ. of British Columbia, Vancouver, BC, Canada – sequence: 4 givenname: David J surname: Jones fullname: Jones, David J email: djjones@physics.ubc.ca organization: Dept. of Phys. & Astron., Univ. of British Columbia, Vancouver, BC, Canada
BookMark	eNotjMFKw0AUAFdQUGuuXrzsD6S-3c1Ldg8eJKYqpPTSei2vyYuumF1JQqV_b0BPw8Aw1-I8xMBC3CpYKpNn92VdbZYaZi3XT_pMJK6wCrFAbR3oS5GM4ycAKAW5MfZKPNTxR4boR5bV7k2-c-CBJh-DPHqSJDvupzhyE0MrOXxQaLjnMMmGjn463YiLjr5GTv65ELtVtS1f0nrz_Fo-1qlXBU6p0paIAAo8gHVaO2idQsWmLcAhZ8B5B-AyhY1Da7Gjlq1pM2PggHNgFuLu7-uZef89-J6G0x4zN-fa_AJLiEch
ContentType	Conference Proceeding
DBID	6IE 6IH CBEJK RIE RIO
DOI	10.1364/CLEO.2010.CMD2
DatabaseName	IEEE Electronic Library (IEL) Conference Proceedings IEEE Proceedings Order Plan (POP) 1998-present by volume IEEE Xplore All Conference Proceedings IEEE Electronic Library Online IEEE Proceedings Order Plans (POP) 1998-present
DatabaseTitleList
Database_xml	– sequence: 1 dbid: RIE name: IEEE/IET Electronic Library (IEL) url: http://ieeexplore.ieee.org/Xplore/DynWel.jsp sourceTypes: Publisher
DeliveryMethod	fulltext_linktorsrc
EISBN	9781557528902 155752890X
EndPage	2
ExternalDocumentID	5499582
Genre	orig-research
GroupedDBID	6IE 6IF 6IG 6IH 6IK 6IL 6IM 6IN AAJGR ALMA_UNASSIGNED_HOLDINGS BEFXN BFFAM BGNUA BKEBE BPEOZ CBEJK IEGSK IERZE IJVOP OCL RIE RIL RIO
ID	FETCH-LOGICAL-i175t-128aaa0075b0892290d9151e3d7095e40e6f009415c95885fade83d4330b595e3
IEDL.DBID	RIE
IngestDate	Thu Jun 29 18:18:14 EDT 2023
IsPeerReviewed	false
IsScholarly	false
Language	English
LinkModel	DirectLink
MergedId	FETCHMERGED-LOGICAL-i175t-128aaa0075b0892290d9151e3d7095e40e6f009415c95885fade83d4330b595e3
PageCount	2
ParticipantIDs	ieee_primary_5499582
PublicationCentury	2000
PublicationDate	2010-May
PublicationDateYYYYMMDD	2010-05-01
PublicationDate_xml	– month: 05 year: 2010 text: 2010-May
PublicationDecade	2010
PublicationTitle	CLEO/QELS: 2010 Laser Science to Photonic Applications
PublicationTitleAbbrev	CLEO
PublicationYear	2010
Publisher	IEEE
Publisher_xml	– name: IEEE
SSID	ssj0001106338
Score	1.4740639
Snippet	Using a femtosecond enhancement cavity in combination with high harmonic generation, we generate EUV radiation out to 61 nm at high (50 MHz) repetition rates...
SourceID	ieee
SourceType	Publisher
StartPage	1
SubjectTerms	(120.0120) Instrumentation (140.4050) Mode-locked lasers (140.4780) Optical resonators (320.7090) Ultrafast lasers and metrology Laser mode locking Laser noise measurement Noise generators Noise level Nonlinear optics Optical harmonic generation Optical pulses Optical resonators Ultrafast optics Ultraviolet sources
Title	Low noise EUV generation via a femtosecond enhancement cavity
URI	https://ieeexplore.ieee.org/document/5499582
hasFullText	1
inHoldings	1
isFullTextHit
isPrint
link	http://sdu.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwlV07T8MwELZoJyZALeItD4yY5uXYGZjSVB3KQ4IitsqJz5CBpCIJ_H18SWiFxMJmWZZfJ_nz2fd9R8ilp4S9pmNcWCo8hoJdTGqTMm6EG0EWGqGROzx_FHcvcpqgTM7VhgsDAG3wGVxjsf3L12XW4FPZBH0ZLu2BOxCR7Lha2_cU69tYd6vXZfTDYBIvkvsudiu-nXq_sqe04DHb-9-w-2S8ZeHRhw2-HJAdKEbkZlF-0aLMK6DJ8pm-tqrRuLn0M1dUUQPvdVmhl6spFG9oU-ydZgqTRIzJcpY8xXPWp0BgucX1mln0UEohrqeOjFCbXUcWo8HXwt6NIHAgNBgc6PLMTlFyozRIXwe-76TcNvAPybAoCzgilKehFmnAI6VNEICFeQvNRiikTwst5DEZ4dJX607lYtWv-uTv6lOy-_OP7rhnZFh_NHBOBpVuLlq7fAOQeo1A
link.rule.ids	310,311,782,786,791,792,798,27934,54767
linkProvider	IEEE
linkToHtml	http://sdu.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwlV09T8MwED1BGWAC1CK-8cBIaNrYsTMwtamKSAsSLWKrnPgMGUgQbeHv40tLKyQWNsuy_HWSn8--9w7gsq2lu6ZTXFgq2x4JdnnK2NQTVrYizEIrDXGH-49y-Ky6McnkXK24MIhYBZ_hNRWrv3xTZnN6KmuSLyOUO3C3BJehXLC11i8qzrtxDtdSmTEIebOTxPeL6K3OoNv-lT-lgo_e7v8G3oPGmofHHlYIsw8bWNThJim_WFHmU2Tx-Im9VLrRtL3sM9dMM4tvs3JKfq5hWLySVal3lmlKE9GAcS8edfreMgmClztkn3kOP7TWhOypryJSZzeRQ2kMjHS3I-Q-hpbCA1sic1NUwmqDKjA8CPxUuAbBAdSKssBDYCINjUy5iLSxnKMDegfOVmoiUEsj1RHUaemT94XOxWS56uO_qy9guz8aJJPkdnh3Ajs_v-p-6xRqs485nsHm1MzPKxt9AzXOkJE
openUrl	ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Abook&rft.genre=proceeding&rft.title=CLEO%2FQELS%3A+2010+Laser+Science+to+Photonic+Applications&rft.atitle=Low+noise+EUV+generation+via+a+femtosecond+enhancement+cavity&rft.au=Mills%2C+Arthur+K&rft.au=Hammond%2C+T+J&rft.au=Stead%2C+Rob&rft.au=Jones%2C+David+J&rft.date=2010-05-01&rft.pub=IEEE&rft.spage=1&rft.epage=2&rft_id=info:doi/10.1364%2FCLEO.2010.CMD2&rft.externalDocID=5499582