Low noise EUV generation via a femtosecond enhancement cavity

Using a femtosecond enhancement cavity in combination with high harmonic generation, we generate EUV radiation out to 61 nm at high (50 MHz) repetition rates with extremely low amplitude noise.

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Bibliographic Details
Published in:	CLEO/QELS: 2010 Laser Science to Photonic Applications pp. 1 - 2
Main Authors:	Mills, Arthur K, Hammond, T J, Stead, Rob, Jones, David J
Format:	Conference Proceeding
Language:	English
Published:	IEEE 01-05-2010
Subjects:	(120.0120) Instrumentation (140.4050) Mode-locked lasers (140.4780) Optical resonators (320.7090) Ultrafast lasers and metrology Laser mode locking Laser noise measurement Noise generators Noise level Nonlinear optics Optical harmonic generation Optical pulses Optical resonators Ultrafast optics Ultraviolet sources
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Description
Summary:	Using a femtosecond enhancement cavity in combination with high harmonic generation, we generate EUV radiation out to 61 nm at high (50 MHz) repetition rates with extremely low amplitude noise.
DOI:	10.1364/CLEO.2010.CMD2