Phase shifting interferometer for the characterization of nanodevices

• Published in: Digest of Papers. Microprocesses and Nanotechnology 2001. 2001 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.01EX468) pp. 246 - 247
• Main Authors: Boher, P., Piel, J.P., Stehle, J.L., Dubois, A., Boccara, A.C.
• Format: Conference Proceeding
• Language: English
• Published: IEEE 2001
• Subjects: Charge coupled devices; Charge-coupled image sensors; Frequency; Microscopy; Mirrors; Optical interferometry; Phase modulation; Phase shifting interferometry; Surface topography; Vibrations
• ISBN: 4891140178; 9784891140175
• DOI: 10.1109/IMNC.2001.984182

A new phase shifting interferometry based on the integrating-bucket technique with sinusoidal phase modulation is presented. The phase modulation is achieved by sinusoidal oscillation of an objective and a mirror attached to a PZT. Phase images are produced in real time at a rate of several Hertz. The system is not very sensitive to the vibrations and gives excellent accuracies and repeatabilities which makes it very suitable to the characterization of the nanodevices.