Advanced femtosecond lasers in Manufacturing
We solved the stability, life-time and cost problems of femtosecond lasers and opened the door to their huge commercial market in near future. Femtosecond lasers will be used in the semiconductor and LCD manufacturing factory
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Published in: | 2007 Quantum Electronics and Laser Science Conference p. 1 |
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Main Authors: | , , , , , |
Format: | Conference Proceeding |
Language: | English |
Published: |
IEEE
01-05-2007
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Subjects: | |
Online Access: | Get full text |
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Summary: | We solved the stability, life-time and cost problems of femtosecond lasers and opened the door to their huge commercial market in near future. Femtosecond lasers will be used in the semiconductor and LCD manufacturing factory |
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DOI: | 10.1109/QELS.2007.4431528 |