Advanced femtosecond lasers in Manufacturing

We solved the stability, life-time and cost problems of femtosecond lasers and opened the door to their huge commercial market in near future. Femtosecond lasers will be used in the semiconductor and LCD manufacturing factory

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Bibliographic Details
Published in:2007 Quantum Electronics and Laser Science Conference p. 1
Main Authors: Sekita, Hitoshi, Imahoko, Tomohiro, Takasago, Kazuya, Kamata, Masanao, Tsujikawa, Susumu, Sumiyoshi, Tetsumi
Format: Conference Proceeding
Language:English
Published: IEEE 01-05-2007
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Summary:We solved the stability, life-time and cost problems of femtosecond lasers and opened the door to their huge commercial market in near future. Femtosecond lasers will be used in the semiconductor and LCD manufacturing factory
DOI:10.1109/QELS.2007.4431528