Micromachining of Grooves for Cutting Fused Silica Plates with Femtosecond Laser Pulses

Micromachining of grooves and their morphologies for cutting fused silica plates are reported in this paper. A femtosecond laser (pulse width: 172 fs, wavelength: 780 nm, and repetition rate: 1 kHz) is used to machine grooves. Ablations are investigated varying pulse energies, scanning speeds and nu...

Full description

Bibliographic Details

Published in:	2007 Conference on Lasers and Electro-Optics - Pacific Rim pp. 1 - 2
Main Authors:	Ahmed, F., Man Seop Lee
Format:	Conference Proceeding
Language:	English
Published:	IEEE 01-08-2007
Subjects:	Laser ablation Laser beam cutting Laser beams Micromachining Morphology Optical microscopy Optical pulses Silicon compounds Surface emitting lasers Ultrafast optics
Online Access:	Get full text
Tags:	Add Tag No Tags, Be the first to tag this record!