Photonic crystal cavities in cubic silicon carbide

We present high quality factor (Q ~ 10 3 ) photonic crystal cavities in cubic silicon carbide (3C-SiC) films grown directly on silicon. We show results in shifted-L3 and nanobeam cavity geometries for applications in nonlinear and quantum photonics.

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Bibliographic Details
Published in:	2014 Conference on Lasers and Electro-Optics (CLEO) - Laser Science to Photonic Applications pp. 1 - 2
Main Authors:	Radulaski, Marina, Buckley, Sonia, Zhang, Linda, Rundquist, Armand, Babinec, Thomas M., Provine, J., AlAssaad, Kassem, Ferro, Gabriel, Vuckovic, Jelena
Format:	Conference Proceeding
Language:	English
Published:	The Optical Society 01-06-2014
Subjects:	Cavity resonators Nonlinear optics Optical device fabrication Optical imaging Photonic crystals Q-factor Silicon carbide
Online Access:	Get full text
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Description
Summary:	We present high quality factor (Q ~ 10 3 ) photonic crystal cavities in cubic silicon carbide (3C-SiC) films grown directly on silicon. We show results in shifted-L3 and nanobeam cavity geometries for applications in nonlinear and quantum photonics.
ISSN:	2160-8989 2160-9004
DOI:	10.1364/CLEO_SI.2014.SM4M.4