The study on metal-insulator-metal capacitor performance improvement

The study on metal-insulator-metal capacitor performance improvement

Metal-insulator-metal capacitor (MIMc) is one of key components in mixed signal (MS) and radio frequency (RF) circuit due to its high performance. In this work, we studied MIMc dielectric, bottom/top plate materials, thickness influence on mismatch, voltage coefficient and temperature coefficient; t...

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Bibliographic Details
Published in:2014 12th IEEE International Conference on Solid-State and Integrated Circuit Technology (ICSICT) pp. 1 - 3
Main Authors: Po Li, Jingwei Peng, Zhang, David Wei
Format: Conference Proceeding
Language:English
Published: IEEE 01-10-2014
Subjects:
Abstracts
Capacitance
CMOS integrated circuits
Process control
Radio frequency
Tin
Very large scale integration
Online Access:Get full text
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Summary:Metal-insulator-metal capacitor (MIMc) is one of key components in mixed signal (MS) and radio frequency (RF) circuit due to its high performance. In this work, we studied MIMc dielectric, bottom/top plate materials, thickness influence on mismatch, voltage coefficient and temperature coefficient; then a near zero voltage and temperature coefficient stacked MIMc structure was proposed and demonstrated for the first time.
ISBN:9781479932962
1479932965
DOI:10.1109/ICSICT.2014.7021618