A hybridised, multi-channel, charged-particle detecting and counting array

• Published in: IEEE Proceedings of the Custom Integrated Circuits Conference pp. 15.7/1 - 15.7/4
• Main Authors: Hatfield, J.V., Comer, J., York, T.A., Hicks, P.J.
• Format: Conference Proceeding
• Language: English
• Published: IEEE 1990
• Subjects: Anodes; Counting circuits; Detectors; Dielectric films; Electrodes; Electrons; Microchannel; Sensor arrays; Spatial resolution; Spectroscopy
• DOI: 10.1109/CICC.1990.124748

A hybrid circuit is reported which is a novel position-sensitive charged-particle detector. Multiple-anode integrated detectors (MAIDs) have been developed which consist of an array of electron sensing anodes and a corresponding array of amplifiers and counters all integrated on a single chip. The anodes are fabricated on the surface of the chip over a thick dielectric film. The active anode array can be arbitrarily extended by abutting individual MAIDs side-by-side, under the control of a customizing master ULA. When mounted with a microchannel plate multiplier, the device counts individual particles or photons.< >