Temperature compensated radio-frequency harmonic bulk acoustic resonators pressure sensors

• Published in: 2010 IEEE International Ultrasonics Symposium pp. 2040 - 2043
• Main Authors: Baron, T., Lebrasseur, E., Romand, J. P., Alzuaga, S., Queste, S., Martin, G., Gachon, D., Laroche, T., Ballandras, S., Masson, J.
• Format: Conference Proceeding
• Language: English
• Published: IEEE 01-10-2010
• Subjects: BAW; Bonding; HBAR; Lapping; Lithium niobate; Pressure Sensor; Resonant frequency; Sensitivity; Temperature compensation; Temperature sensors
• ISBN: 1457703823; 9781457703829
• ISSN: 1051-0117
• DOI: 10.1109/ULTSYM.2010.5935869

In this work, we propose a compensated temperature pressure sensor fabricated on compound LiNbO 3 /Quartz/Quartz substrates obtained by Au/Au bonding at room temperature and double face lapping/polishing of LiNbO 3 /Quartz stack and a final gold bonding with a structured Quartz wafer. This paper shows the possibility to obtain device which is intrinsically low sensitive to thermal effects, and even allowing a second order compensation thanks to the Quartz thermal stability Sensitivity of the final sensor to bending moments then is tested and results show pressure sensitivity of such devices.