Fabrication and Characterization of 3D Microelectrode Arrays (3D MEAS) with Tri-Modal (Electrical, Optical, and Microfluidic) Interrogation of Electrogenic Cell Constructs

• Published in: 2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) pp. 767 - 770
• Main Authors: Freitas Orrico, Julia, Kundu, Avra, Didier, Charles M., Bosak, Alexander, Moore, Michael J., Rajaraman, Swaminathan
• Format: Conference Proceeding
• Language: English
• Published: IEEE 20-06-2021
• Subjects: 3D Microelectrode Arrays (3D MEAs); Biocompatibility Assay; Electrogenic Cells; In vitro; Magnetic Assembly; Microelectrodes; Microfabrication; Microfluidics; Micromilling; Optical device fabrication; Optical sensors; Spheroids; Three-dimensional displays; Transparency Assay
• ISSN: 2167-0021
• DOI: 10.1109/Transducers50396.2021.9495378

We present a polymer and metal-based microfabrication technology toward 3D Microelectrode Arrays (3D MEAs) with tri-modal functionality for obtaining simultaneous data sets comprising electrical, optical and microfluidic markers from a variety of electrogenic cellular constructs. 3D MEAs are the next generation interfaces to transduce multi-modal data sets from the burgeoning field of "organ-on-a-chip" in vitro modeling of biological functions. The microfabrication process is fully characterized for low and higher density 3D electrodes/ µF ports along with full spectrum impedance showcasing the ability to control the 3D microelectrode size. Further the material set used in the microfabrication process is characterized for biological metrics through both a novel transparency assay along with a biocompatibility assay with an electrogenic cell culture system. Lastly, rapid neuronal spheroid attachment to the 3D microfluidic ports of the tri-modal 3D MEA is demonstrated successfully.