Design and technology for uniform aluminum nitride piezoelectric micromachined ultrasonic transducers with radial array

This paper reports on design, technology and mechanical characterization in air of a piezoelectric aluminum nitride (AlN) based micromachined ultrasonic transducer (PMUT) with six radial symmetric arrays. The PMUT consists of 4018 single membranes with a resonance frequency of 3.4 MHz, a quasi-stati...

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Bibliographic Details
Published in:	2021 Smart Systems Integration (SSI) pp. 1 - 4
Main Authors:	Stoeckel, Chris, Melzer, Marcel, Meinel, Katja, Tavakolibasti, Majid, Forke, Roman, Zimmermann, Sven, Otto, Thomas, Kuhn, Harald
Format:	Conference Proceeding
Language:	English
Published:	IEEE 27-04-2021
Subjects:	Acoustics AlN aluminum nitride piezoelectric micromachined ultrasonic transducer PMUT Resonant frequency Semiconductor device measurement Simulation Ultrasonic transducer arrays Ultrasonic transducers Ultrasonic variables measurement
Online Access:	Get full text
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Summary:	This paper reports on design, technology and mechanical characterization in air of a piezoelectric aluminum nitride (AlN) based micromachined ultrasonic transducer (PMUT) with six radial symmetric arrays. The PMUT consists of 4018 single membranes with a resonance frequency of 3.4 MHz, a quasi-static deflection of 272 pm/V and a resonant deflection of up to 71.3 nm/V. The small standard deviation of the resonance frequency over the chip is 47 kHz.
DOI:	10.1109/SSI52265.2021.9467017