Performance Analysis of Wideband PMUTs: a Comparative Study Between Sol-Gel PZT, PVD PZT, and 15% ScAlN-Based Arrays Through Experimental Evaluation

In the design of Piezoelectric Micromachined Ultrasonic Transducers (PMUTs) for wideband immersion operation, the choice of piezoelectric material is crucial for determining transducer performance. The sensitivity, bandwidth, and maximum transmit (TX) pressure are significantly impacted by the selec...

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Bibliographic Details
Published in:	2023 IEEE International Ultrasonics Symposium (IUS) pp. 1 - 4
Main Authors:	Savoia, Alessandro S., Giusti, Domenico, Prelini, Carlo, Chang, Peter, Leotti, Alberto, Lee, Joshua, Koh, Yul, Ferrera, Marco
Format:	Conference Proceeding
Language:	English
Published:	IEEE 03-09-2023
Subjects:	Benchmarking Characterization Lead Performance Assessment Physical vapor deposition Piezoelectric materials PMUT PVD PZT ScAlN Sensitivity SolGel Transducers Ultrasonic MEMS Ultrasonic transducers Wearable computers
Online Access:	Get full text
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