Performance Analysis of Wideband PMUTs: a Comparative Study Between Sol-Gel PZT, PVD PZT, and 15% ScAlN-Based Arrays Through Experimental Evaluation

• Published in: 2023 IEEE International Ultrasonics Symposium (IUS) pp. 1 - 4
• Main Authors: Savoia, Alessandro S., Giusti, Domenico, Prelini, Carlo, Chang, Peter, Leotti, Alberto, Lee, Joshua, Koh, Yul, Ferrera, Marco
• Format: Conference Proceeding
• Language: English
• Published: IEEE 03-09-2023
• Subjects: Benchmarking; Characterization; Lead; Performance Assessment; Physical vapor deposition; Piezoelectric materials; PMUT; PVD; PZT; ScAlN; Sensitivity; SolGel; Transducers; Ultrasonic MEMS; Ultrasonic transducers; Wearable computers
• ISSN: 1948-5727
• DOI: 10.1109/IUS51837.2023.10307094

In the design of Piezoelectric Micromachined Ultrasonic Transducers (PMUTs) for wideband immersion operation, the choice of piezoelectric material is crucial for determining transducer performance. The sensitivity, bandwidth, and maximum transmit (TX) pressure are significantly impacted by the selected material, thereby determining the suitability of PMUTs for various application scenarios, such as medical imaging, wearables, and implants. This work reports on an experimental comparative analysis of wideband PMUT performance when designed and fabricated using sol-gel (SG) Lead Titanate Zirconate (PZT), Physical Vapor Deposition (PVD) PZT, and 15% Scandium-doped Aluminum Nitride (ScAlN), aiming to provide insights for optimizing PMUT design by selecting the most appropriate material for specific applications.