Cascaded Multi-Stage Directional Coupler on Silicon-on-Insulator

We demonstrate the feasibility of a width-engineered cascaded multi-stage directional coupler on silicon-on-insulator for broadband (within 5% power variation over 100 nm wavelength range) and fabrication tolerant operation ( 1\sigma =2.5\% across 12-inch wafer).

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Bibliographic Details
Published in:	2022 Conference on Lasers and Electro-Optics Pacific Rim (CLEO-PR) pp. 1 - 2
Main Authors:	Tang, Cheng-Tse, Jou, Chewn-Pu, Cho, Lan-Chou, Kuo, Fong-Wei, Chung, Ming-Yang, Huang, Tai-Chun, Hung, Yung-Jr
Format:	Conference Proceeding
Language:	English
Published:	IEEE 31-07-2022
Subjects:	Broadband communication Directional couplers Electro-optical waveguides Fabrication Lasers and electrooptics Mach-Zehnder interferometers Silicon-on-insulator
Online Access:	Get full text
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Description
Summary:	We demonstrate the feasibility of a width-engineered cascaded multi-stage directional coupler on silicon-on-insulator for broadband (within 5% power variation over 100 nm wavelength range) and fabrication tolerant operation ( 1\sigma =2.5\% across 12-inch wafer).
DOI:	10.1109/CLEO-PR62338.2022.10432172