Advanced novel optical stack technologies for high SNR in CMOS Image Sensor

• Published in: 2022 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits) pp. 353 - 354
• Main Authors: Park, Hye Yeon, Lee, Yunki, Park, Jonghoon, Song, Hyunseok, Lee, Taesung, Gweon, Hyung Keun, Jung, Yunji, Bae, Jeongmin, Kim, Boseong, Han, Junwon, Kim, Seungwon, Yoon, Cheolsang, Kim, Jeongki, Lee, Changkeun, Yoo, Sehoon, Kim, EuiYeol, Baek, Hyunmin, Park, Howoo, Kim, Bumsuk, Ahn, JungChak, Yim, JoonSeo
• Format: Conference Proceeding
• Language: English
• Published: IEEE 12-06-2022
• Subjects: CMOS image sensors; Image resolution; Optical filters; Optical imaging; Optical losses; Sensitivity; Very large scale integration
• ISSN: 2158-9682
• DOI: 10.1109/VLSITechnologyandCir46769.2022.9830428

Smaller pixels with high resolution are widely used for CMOS image sensor (CIS) and it needs technologies to reduce the size of the chips while performance or quality of image is even more enhanced. However, the decrease in pixel size inevitably causes degradation of optical properties. In this paper, we introduce a new technique to improve the sensitivity and signal-to-noise ratio (SNR) by using new color filter material and optical structure which is necessary to implement high resolution. These development of new optical pixel structures are able to overcome the degradation of characteristics resulting from pixel shrink and guarantee the possibility of pixel shrink in the future.