Compact quasi planar silicon bandpass filters based on metallic periodic structure for Q and V band applications

• Published in: 2004 IEEE MTT-S International Microwave Symposium Digest (IEEE Cat. No.04CH37535) Vol. 3; pp. 1459 - 1462 Vol.3
• Main Authors: Ferrand, P., Chatras, M., Baillargeat, D., Blondy, P., Verdeyme, S., Puech, J., Lapierre, L., Galiere, J., Estebe, E.
• Format: Conference Proceeding
• Language: English
• Published: Piscataway NJ IEEE 2004
• Subjects: Applied sciences; Band pass filters; Bandwidth; Circuit properties; Conductivity; Coplanar waveguides; Electric, optical and optoelectronic circuits; Electronic circuits; Electronics; Exact sciences and technology; Feeds; Frequency filters; Lattices; Microelectronic fabrication (materials and surfaces technology); Microwave circuits, microwave integrated circuits, microwave transmission lines, submillimeter wave circuits; Oscillators, resonators, synthetizers; Periodic structures; Resonator filters; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices; Silicon; Wet etching; Flip-chip; Microwave; Printed circuit board; Microwave filter; Q band; V band; Periodic structure; Millimetric wave; Microelectronic fabrication; Reactive ion etching; Wet process; Tapered waveguide section; Band pass filter; Printed circuit; Coplanar waveguides; Wafer; Coupled resonator; Planar technology; Via hole
• ISBN: 0780383311; 9780780383319
• ISSN: 0149-645X; 2576-7216
• DOI: 10.1109/MWSYM.2004.1338848

Small size filters are presented here, they are based on a periodic lattice of metallic holes that form coupled silicon resonators. The first structure is a filter at 45 GHz with 8% bandwidth at -3 db, realized on 430 /spl mu/m thick high resistivity silicon wafer using a wet etching process. I/O CPW feeds are printed on the top of the substrate. The second structure is a filter at 58.5 GHz with 2% bandwidth at -3 db. The via holes lattice is realized with deep RIE process and the filter is bonded to a PCB with a flip chip technique. Based on the same principle, a CPW to waveguide transition is finally presented.