Parameter estimation from nonlinear frequency response of MEMS resonators

• Published in: 2015 IEEE International Symposium on Circuits and Systems (ISCAS) pp. 1318 - 1319
• Main Authors: Brenes, A., Juillard, J., Bourgois, L., Vinci dos Santos, F.
• Format: Conference Proceeding
• Language: English
• Published: IEEE 01-05-2015
• Subjects: Fitting; Frequency measurement; Frequency response; MEMS; Micromechanical devices; nonlinear regime; open-loop actuation; Optical resonators; pulsed-mode actuation; Q-factor; Resonant frequency; resonator characterization
• ISSN: 0271-4302; 2158-1525
• DOI: 10.1109/ISCAS.2015.7168884

This paper deals with parameter extraction from nonlinear frequency responses of resonant systems. We show that nonlinear frequency responses can be exploited to identify not only the Q-factor and the natural frequency of a resonator, but also information about its internal structure. The proposed method requires less demanding measurements and is less model-dependent than the existing state-of-the-art methods. Its accuracy is illustrated with simulations and it is experimentally validated on a capacitive MEMS resonator.