Micro-contact printing on oxide surfaces for model catalysts using e-beam written masters in hydrogen silsesquioxane

• Published in: Microelectronic engineering Vol. 73; pp. 202 - 208
• Main Authors: van Delft, F.C.M.J.M., van den Heuvel, F.C., Kuiper, A.E.T., Thüne, P.C., Niemantsverdriet, J.W.
• Format: Journal Article
• Language: English
• Published: Elsevier B.V 01-06-2004
• Subjects: Catalysis; Catalyst; Electron beam lithography; Hydrogen silsesquioxane; Micro-contact printing; Catalysis; Hydrogen silsesquioxane; Electron beam lithography; Micro-contact printing; Catalyst
• ISSN: 0167-9317; 1873-5568
• DOI: 10.1016/j.mee.2004.02.041

In order to make model catalysts for fundamental research in heterogeneous catalysis, carrier oxide surfaces with well-defined properties are needed. Micro-contact printing has been used to make specific parts of a (hydroxylated) silicon oxide surface hydrophobic. The method comprises the e-beam writing of a master in hydrogen silsesquioxane (HSQ) on silicon, the casting of a polydimethylsiloxane (PDMS) silicone elastomer stamp, the inking of the stamp with octadecyltrichlorosilane (OTS) and the printing of the OTS on a hydroxylated SiO
2 surface. KCl crystals have been precipitated on the hydrophilic part of the printed surface by evaporation of ethanol droplets with dissolved KCl. KCl serves as a model system for the usual transition metal salts employed in the preparation of metal- or metal-oxide catalysts. Crystal size and crystallite density-on-carrier can be determined by the duty cycle and pitch of the hydrophilic part of the printed surface.