RAMAN SPECTROSCOPY USE FOR MONITORING OF CHANGES IN THE GLASS STRUCTURE OF THE THIN LAYERS CAUSED BY ION IMPLANTATION

• Published in: Ceramics (Praha) Vol. 59; no. 3; pp. 187 - 193
• Main Authors: Nekvindova, P, Svecova, B, Stanek, S, Vytykacova, S, Mackova, A, Malinsky, P, Machovic, V, Spirkova, J
• Format: Journal Article
• Language: English
• Published: University of Chemistry and Technology, Prague 01-01-2015
• Subjects: Glass; Glasses; Gold; Ion implantation; Nano particles; Nanoparticles; Networks; Raman spectroscopy; Silicates; Thin films
• ISSN: 0862-5468; 1804-5847

Raman spectroscopy was used to characterise the changes in glass structure of the thin layers caused by ion implantation. Various types of silicate glasses were implanted by Au+ ions with an energy of 1.7 MeV and a fluence of 1 x 10 exp(16) ions/cm2 to create gold nanoparticles in the thin sub-surface layer of the glass. It was proved that the structure of the glass has a clear impact on the extent of depolymerisation of the glass network after implantation. It was shown that the degree of glass matrix depolymerisation can be described using the evaluation of Qn factors in the implanted layers from different depths. After analysis of Raman spectra, the relation between nucleation and the resulting parameters of the gold nanoparticles was shown with the feasibility of the glass to recover its structure during post-implantation annealing. The creation of new bonds in the glass network is also discussed.