Correlation between the macroscopic ferroelectric material properties of Si:HfO 2 and the statistics of 28 nm FeFET memory arrays

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Bibliographic Details
Published in:	Ferroelectrics Vol. 497; no. 1; pp. 42 - 51
Main Authors:	Mueller, S., Slesazeck, S., Henker, S., Flachowsky, S., Polakowski, P., Paul, J., Smith, E., Müller, J., Mikolajick, T.
Format:	Journal Article
Language:	English
Published:	20-06-2016
Online Access:	Get full text
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ISSN:	0015-0193 1563-5112
DOI:	10.1080/00150193.2016.1162021