Ga 2 O 3 -on-SiC Composite Wafer for Thermal Management of Ultrawide Bandgap Electronics
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Published in: | ACS applied materials & interfaces Vol. 13; no. 34; pp. 40817 - 40829 |
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Main Authors: | , , , , , , , , , , , , , , , , , , , , |
Format: | Journal Article |
Language: | English |
Published: |
01-09-2021
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Online Access: | Get full text |
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ISSN: | 1944-8244 1944-8252 |
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DOI: | 10.1021/acsami.1c09736 |