Fluorine Doping and Superconductivity of Nd 2 CuO 4 Thin Films

• Published in: Japanese Journal of Applied Physics Vol. 29; no. 9A; p. L1642
• Main Authors: Koinuma, Hideomi, Takeuchi, Kou, Yoshimoto, Mamoru, Hashida, Kenji, Nakabayashi, Masaaki, Gonda, Satoshi, Hirayama, Tohru, Shiraishi, Tadashi
• Format: Journal Article
• Language: English
• Published: 01-09-1990
• ISSN: 0021-4922; 1347-4065
• DOI: 10.1143/JJAP.29.L1642

Fluorine was doped into sputter-deposited Nd
2
CuO
4
films to induce superconductivity in the films. The films annealed in the presence of NF
3
gas were observed to show remarkable resistivity change which was in parallel with the change of
a
-axis length. Fluorine incorporation in the films was verified by the X-ray photoelectron spectroscopy analysis. The specimen annealed at 800°C in 0.1 Torr NF
3
(1%)/Ar gas under UV light irradiation exhibited the onset of superconductivity at 27 K after a reducing procedure at 700°C in Ar.