A Self-Calibration Stitching Method for Pitch Deviation Evaluation of a Long-Range Linear Scale by Using a Fizeau Interferometer

• Published in: Sensors (Basel, Switzerland) Vol. 21; no. 21; p. 7412
• Main Authors: Xiong, Xin, Shimizu, Yuki, Matsukuma, Hiraku, Gao, Wei
• Format: Journal Article
• Language: English
• Published: Switzerland MDPI AG 08-11-2021; MDPI
• Subjects: Algorithms; Aperture; Calibration; Deviation; Error analysis; Evaluation; Interferometry; linear scale; optical encoder; Optical encoders; pitch deviation; Self calibration; Stitching; stitching interferometry; stitching interferometry; pitch deviation; linear scale; optical encoder; self-calibration
• ISSN: 1424-8220; 1424-8220
• DOI: 10.3390/s21217412

An interferometric self-calibration method for the evaluation of the pitch deviation of scale grating has been extended to evaluate the pitch deviation of the long-range type linear scale by utilizing the stitching interferometry technique. Following the previous work, in which the interferometric self-calibration method was proposed to assess the pitch deviation of the scale grating by combing the first-order diffracted beams from the grating, a stitching calibration method is proposed to enlarge the measurement range. Theoretical analysis is performed to realize the
-directional pitch deviation calibration of the long-range linear scale while reducing the second-order accumulation effect by canceling the influence of the reference flat error in the sub-apertures' measurements. In this paper, the stitching interferometry theory is briefly reviewed, and theoretical equations of the
-directional pitch deviation stitching are derived for evaluation of the pitch deviation of the long-range linear scale. Followed by the simulation verification, some experiments with a linear scale of 105 mm length from a commercial interferential scanning-type optical encoder are conducted to verify the feasibility of the self-calibration stitching method for the calibration of the
-directional pitch deviation of the linear scale over its whole area.