A review of piezoelectric MEMS sensors and actuators for gas detection application

• Published in: Discover nano Vol. 18; no. 1; p. 25
• Main Authors: Ba Hashwan, Saeed S., Khir, Mohd Haris Md, Nawi, Illani Mohd, Ahmad, Mohamad Radzi, Hanif, Mehwish, Zahoor, Furqan, Al-Douri, Y., Algamili, Abdullah Saleh, Bature, Usman Isyaku, Alabsi, Sami Sultan, Sabbea, Mohammed O. Ba, Junaid, Muhammad
• Format: Journal Article
• Language: English
• Published: New York Springer US 27-02-2023; Springer Nature B.V; SpringerOpen
• Subjects: Actuators; Bulk acoustic wave devices; Chemistry and Materials Science; Circuits; Design parameters; Energy; Engineering; Fabrication; Gas sensors; Gases; Graphene; Materials Science; Medical equipment; Metal-organic frameworks; Microcantilever; Microelectromechanical system (MEMS); Microelectromechanical systems; Micromachining; Molecular Medicine; Nanochemistry; Nanoscale Science and Technology; Nanotechnology; Nanotechnology and Microengineering; Piezoelectric actuators; Piezoelectricity; Polymers; QCM; Quartz crystal microbalance; Quartz crystals; Review; Sensing principle; Sensors; Surface acoustic waves; Piezoelectric actuators; Microcantilever; SAW; BAW; PMUT; QCM; Sensing layers; Microelectromechanical system (MEMS); Sensing principle; Gas sensors; FBAR
• ISSN: 2731-9229; 1931-7573; 2731-9229; 1556-276X
• DOI: 10.1186/s11671-023-03779-8

Piezoelectric microelectromechanical system (piezo-MEMS)-based mass sensors including the piezoelectric microcantilevers, surface acoustic waves (SAW), quartz crystal microbalance (QCM), piezoelectric micromachined ultrasonic transducer (PMUT), and film bulk acoustic wave resonators (FBAR) are highlighted as suitable candidates for highly sensitive gas detection application. This paper presents the piezo-MEMS gas sensors’ characteristics such as their miniaturized structure, the capability of integration with readout circuit, and fabrication feasibility using multiuser technologies. The development of the piezoelectric MEMS gas sensors is investigated for the application of low-level concentration gas molecules detection. In this work, the various types of gas sensors based on piezoelectricity are investigated extensively including their operating principle, besides their material parameters as well as the critical design parameters, the device structures, and their sensing materials including the polymers, carbon, metal–organic framework, and graphene.