11 nm hard X-ray focus from a large-aperture multilayer Laue lens

• Published in: Scientific reports Vol. 3; no. 1; p. 3562
• Main Authors: Huang, Xiaojing, Yan, Hanfei, Nazaretski, Evgeny, Conley, Raymond, Bouet, Nathalie, Zhou, Juan, Lauer, Kenneth, Li, Li, Eom, Daejin, Legnini, Daniel, Harder, Ross, Robinson, Ian K., Chu, Yong S.
• Format: Journal Article
• Language: English
• Published: London Nature Publishing Group UK 20-12-2013; Nature Publishing Group
• Subjects: 147/136; 639/301/930/2735; 639/624/1107/328/968; 639/766/400/1106; Diffraction; Humanities and Social Sciences; MATERIALS SCIENCE; multidisciplinary; Science; X-rays
• ISSN: 2045-2322; 2045-2322
• DOI: 10.1038/srep03562

The focusing performance of a multilayer Laue lens (MLL) with 43.4 μm aperture, 4 nm finest zone width and 4.2 mm focal length at 12 keV was characterized with X-rays using ptychography method. The reconstructed probe shows a full-width-at-half-maximum (FWHM) peak size of 11.2 nm. The obtained X-ray wavefront shows excellent agreement with the dynamical calculations, exhibiting aberrations less than 0.3 wave period, which ensures the MLL capable of producing a diffraction-limited focus while offering a sufficient working distance. This achievement opens up opportunities of incorporating a variety of in-situ experiments into ultra high-resolution X-ray microscopy studies.