Loss-less multilevel crossing of busline waveguide in vertically coupled microring resonator filter

• Published in: IEEE photonics technology letters Vol. 16; no. 2; pp. 473 - 475
• Main Authors: Hatakeyama, Y., Hanai, T., Suzuki, S., Kokubun, Y.
• Format: Journal Article
• Language: English
• Published: New York IEEE 01-02-2004; The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
• Subjects: Light scattering; Multilevel; Optical device fabrication; Optical filters; Optical ring resonators; Optical scattering; Optical surface waves; Optical waveguides; Photonics; Planar waveguides; Resonator filters; Resonators; Scattering; Surface waves; Waveguides
• ISSN: 1041-1135; 1941-0174
• DOI: 10.1109/LPT.2003.822229

To eliminate the scattering loss at the crossing points of cross grid busline waveguides, a multilevel crossing structure of busline waveguide was introduced into the vertically coupled microring resonator filter. The top surface of each buried waveguide was perfectly planarized by a new fabrication process and clear filter responses were observed for a single ring and a series coupled double ring resonator with multilevel crossing busline waveguides.