Metrology of a Focusing Capillary Using Optical Ptychography

• Published in: Sensors (Basel, Switzerland) Vol. 20; no. 22; p. 6462
• Main Authors: Huang, Xiaojing, Nazaretski, Evgeny, Xu, Weihe, Hidas, Dean, Cordier, Mark, Stripe, Benjamin, Yun, Wenbing, Chu, Yong S.
• Format: Journal Article
• Language: English
• Published: Basel MDPI AG 12-11-2020; MDPI
• Subjects: Aperture; Capillary optics; Focusing; Ion beams; Kinematics; Laser beams; Lasers; Letter; MATERIALS SCIENCE; Metrology; Microscopy; Motion control; Normal distribution; Optics; ptychography; Wave fronts; X-ray capillary optics; X-ray microscopy; X-rays
• ISSN: 1424-8220; 1424-8220
• DOI: 10.3390/s20226462

The focusing property of an ellipsoidal monocapillary has been characterized using the ptychography method with a 405 nm laser beam. The recovered wavefront gives a 12.5×10.4μm2 focus. The reconstructed phase profile of the focused beam can be used to estimate the height error of the capillary surface. The obtained height error shows a Gaussian distribution with a standard deviation of 1.3 μm. This approach can be used as a quantitative tool for evaluating the inner functional surfaces of reflective optics, complementary to conventional metrology methods.