Advances in Capacitive Micromachined Ultrasonic Transducers

Capacitive micromachined ultrasonic transducer (CMUT) technology has enjoyed rapid development in the last decade. Advancements both in fabrication and integration, coupled with improved modelling, has enabled CMUTs to make their way into mainstream ultrasound imaging systems and find commercial suc...

Full description

Saved in:

Bibliographic Details
Published in:	Micromachines (Basel) Vol. 10; no. 2; p. 152
Main Authors:	Brenner, Kevin, Ergun, Arif Sanli, Firouzi, Kamyar, Rasmussen, Morten Fischer, Stedman, Quintin, Khuri-Yakub, Butrus Pierre
Format:	Journal Article
Language:	English
Published:	Switzerland MDPI AG 23-02-2019 MDPI
Subjects:	Acoustics Atmospheric pressure Bandwidths capacitive capacitive micromachined ultrasonic transducer (CMUT) Circuits Electric fields Electrodes fabrication Mechanics Medical imaging Micromachining modelling Review transducer Transducers Ultrasonic imaging Ultrasonic transducers micromachining capacitive micromachined ultrasonic transducer (CMUT) transducer fabrication acoustics capacitive modelling
Online Access:	Get full text
Tags:	Add Tag No Tags, Be the first to tag this record!

Description
Summary:	Capacitive micromachined ultrasonic transducer (CMUT) technology has enjoyed rapid development in the last decade. Advancements both in fabrication and integration, coupled with improved modelling, has enabled CMUTs to make their way into mainstream ultrasound imaging systems and find commercial success. In this review paper, we touch upon recent advancements in CMUT technology at all levels of abstraction; modeling, fabrication, integration, and applications. Regarding applications, we discuss future trends for CMUTs and their impact within the broad field of biomedical imaging.
Bibliography:	ObjectType-Article-2 SourceType-Scholarly Journals-1 ObjectType-Feature-3 content type line 23 ObjectType-Review-1 These authors contributed equally to this work.
ISSN:	2072-666X 2072-666X
DOI:	10.3390/mi10020152