Fabrication of various nano-structured nickel stamps using anodic aluminum oxide

• Published in: Microsystem technologies : sensors, actuators, systems integration Vol. 20; no. 12; pp. 2157 - 2163
• Main Author: Park, Jang Min
• Format: Journal Article
• Language: English
• Published: Berlin/Heidelberg Springer Berlin Heidelberg 01-12-2014; Springer
• Subjects: Cross-disciplinary physics: materials science; rheology; Electronics and Microelectronics; Engineering; Exact sciences and technology; Instrumentation; Materials science; Mechanical Engineering; Methods of nanofabrication; Nanoscale pattern formation; Nanotechnology; Physics; Technical Paper; Sulfamic Acid; Anodic Aluminum Oxide; Molten Polymer; Injection Molding; Phosphoric Acid Solution; Fabrication; Scanning electron microscopy; Soft lithography; Manufacturing processes; Nanopatterning; Anodizing; Electroforming; Morphology; Injection molding; Nickel; Nanostructures
• ISSN: 0946-7076; 1432-1858
• DOI: 10.1007/s00542-014-2094-y

This paper presents a fabrication method of various nickel stamps based on anodic aluminum oxide (AAO) and nickel electroforming (NE) processes. By AAO process, master templates which have closely-packed nano dimple or pore structure array are fabricated. Then nickel stamps having negative surface topology of the master templates are fabricated by NE process. Also positive nickel stamps are fabricated from the negative stamps by NE process with the help of nickel passivation technique. So achieved nickel stamps are employed in injection molding and hot embossing processes for replication of nano-structured surfaces.