Multiaxis interferometric displacement measurement for local probe microscopy

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Bibliographic Details
Published in:	Open Physics Vol. 10; no. 1; pp. 225 - 231
Main Authors:	Lazar Josef, Hrabina Jan, Šerý Mojmír, Klapetek Petr, Číp Ondřej
Format:	Journal Article
Language:	English
Published:	De Gruyter 01-02-2012
Subjects:	interferometry microscopy nanometrology
Online Access:	Get full text
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Description
ISSN:	2391-5471
DOI:	10.2478/s11534-011-0093-5