Corrections for Wavelength Variations in Precision Interferometric Displacement Measurements

Precision interferometric displacement measurements require deadpath corrections to account for variations in wavelength during the course of the measurement. This paper discusses common errors in applying deadpath corrections and describes the correction necessary to fully account for variations in...

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Bibliographic Details
Published in:Journal of research of the National Institute of Standards and Technology Vol. 101; no. 5; pp. 671 - 674
Main Authors: Stone, Jack, Phillips, Steven D, Mandolfo, Gary A
Format: Journal Article
Language:English
Published: United States Superintendent of Documents 01-09-1996
[Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology
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Summary:Precision interferometric displacement measurements require deadpath corrections to account for variations in wavelength during the course of the measurement. This paper discusses common errors in applying deadpath corrections and describes the correction necessary to fully account for variations in wavelength.
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ISSN:1044-677X
2165-7254
DOI:10.6028/jres.101.065