Waveguides consisting of single-crystal lithium niobate thin film and oxidized titanium stripe

Strip-loaded waveguides were fabricated by the direct oxidation of a titanium film based on the single-crystal lithium niobate. The method avoided the surface roughness problems that are normally introduced during dry etching of waveguide sidewalls. Propagation modes of the composite strip waveguide...

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Bibliographic Details
Published in:Optics express Vol. 23; no. 19; pp. 24212 - 24219
Main Authors: Li, Shuang, Cai, Lutong, Wang, Yiwen, Jiang, Yunpeng, Hu, Hui
Format: Journal Article
Language:English
Published: United States 21-09-2015
Online Access:Get full text
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Summary:Strip-loaded waveguides were fabricated by the direct oxidation of a titanium film based on the single-crystal lithium niobate. The method avoided the surface roughness problems that are normally introduced during dry etching of waveguide sidewalls. Propagation modes of the composite strip waveguide were analyzed by a full-vectorial finite difference method. The minimum dimensions of the propagation modes were calculated to be 0.7 μm(2) and 1.1 μm(2) for quasi-TM mode and quasi-TE mode at 1550 nm when the thickness of the LN layer and TiO(2) strip was 660 nm and 95 nm, respectively. The optical intensity was as high as 93% and was well confined in the LN layer for quasi-TM polarization. In this experiment, the propagation losses for the composite strip waveguide with 6 μm wide TiO(2) were 14 dB/cm for quasi-TM mode and 5.8 dB/cm for quasi-TE mode, respectively. The compact hybrid structures have the potential to be utilized for compact photonic integrated devices.
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content type line 23
ISSN:1094-4087
1094-4087
DOI:10.1364/oe.23.024212