Prototype feedback-controlled bidirectional actuation system for MEMS applications

• Published in: Journal of microelectromechanical systems Vol. 9; no. 2; pp. 245 - 251
• Main Authors: Bhansali, S., Zhang, A.L., Zmood, R.B., Jones, P.E., Sood, D.K.
• Format: Journal Article
• Language: English
• Published: New York, NY IEEE 01-06-2000; Institute of Electrical and Electronics Engineers; The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
• Subjects: Active control; Actuators; Coiling; Coils; Control systems; Devices; Electronic equipment; Electronics; Electroplating; Etching; Exact sciences and technology; Fabrication; Feedback control; Instruments, apparatus, components and techniques common to several branches of physics and astronomy; Magnetic bearings; Mechanical instruments, equipment and techniques; Microactuators; Microelectromechanical systems; Micromagnetics; Micromechanical devices; Micromechanical devices and systems; Permanent magnets; Physics; Position control; Prototypes; Proximity sensors; Sensor systems; Sensors; Coils; Actuators; Degrees of freedom; Prototype; Microsystem; Position control; Electronics; Inductive transducer; Control systems; Etching; Micromechanical devices; Electromagnetic devices; Command and control systems; Micromagnetism; Feedback; Position sensor; Electrodeposition; Plates; Electromechanical device; Electromagnetism; Feedback system; Measurement sensor; Magnetic bearings; Microsuspension; Added mass; Spacer; Position measurement; Miniaturization; System with one degree of freedom; Mechanical transmissions; Magnetic suspension
• ISSN: 1057-7157; 1941-0158
• DOI: 10.1109/84.846705

We have successfully developed a one degree-of-freedom microsuspension system, with active position control, as a paradigm of a micromagnetic bearing. This system integrates an electromagnetic actuator, a position sensor, and a feedback control system that provides active position control. This paper discusses the design and fabrication details of the microelectromechanical system (MEMS) components: the beam mass structure integrated with a drive coil and metallized targets, spacer plate, and sensor coils. It also discusses their integration with millimagnets and electronics. Noncontact magnetic bearings based on this principle have the potential of overcoming the tribo-physical issues associated with active MEMS devices.