Detection of deposition rate of plasma-polymerized acrylate and methacrylate derivatives using quartz crystal microbalance

• Published in: Thin solid films Vol. 457; no. 1; pp. 26 - 33
• Main Authors: Kurosawa, Shigeru, Atthoff, Björn, Aizawa, Hidenobu, Hilborn, Jöns
• Format: Journal Article Conference Proceeding
• Language: English
• Published: Lausanne Elsevier B.V 01-06-2004; Elsevier Science
• Subjects: Acrylate derivatives; Cross-disciplinary physics: materials science; rheology; Deposition rate; Exact sciences and technology; Materials science; Methods of deposition of films and coatings; film growth and epitaxy; Physics; Plasma polymers; Plasma processing and deposition; Quartz crystal microbalance; Vapor phase epitaxy; growth from vapor phase; Deposition rate; Plasma processing and deposition; Quartz crystal microbalance; Plasma polymers; Acrylate derivatives; Pressure effects; Films; Chemical structure; Plasma assisted processing; Polymerization; Crystal growth from vapors; Experimental study; Coated material; Polyacrylates; Organic compounds; Glow discharges; Quartz microbalance
• ISSN: 0040-6090; 1879-2731
• DOI: 10.1016/j.tsf.2003.12.008

The deposition rates of plasma-polymerized (pp-)films of 12 acrylate derivatives (CH
2CHCOOR: substitution R is H, CH
3, CHCH
2, CH
2CH
3, CH
2CH
2CH
3, (CH
2)
3CH
3, C(CH
3)
3, CH
2CH(CH
3)
2, CH
2(CH
2)
4CH
3, CH
2CF
3, CH
2CF
2CF
3, CH
2(CF
2)
2CF
3), and 12 methacrylate derivatives (CH
2CCH
3COOR′: substitution R′ is H, CH
3, CHCH
2, CH
2CH
3, CH
2CH
2CH
3, (CH
2)
3CH
3, C(CH
3)
3, CH
2CH(CH
3)
2, CH
2(CH
2)
4CH
3, CH
2CF
3, CH
2CF
2CF
3, CH
2(CF
2)
2CF
3) are determined by the quartz crystal microbalance technique. Using the same polymerization conditions (100 W RF and 100 Pa vapor pressure) for the various monomers, it is found that the deposition rates were proportional to the polymerization time. The average deposition rate of pp-acrylate derivatives is larger than that of pp-methacrylate derivatives without pp-hexylacrylate. The average deposition rate of pp-fluoroalkylacrylates was higher than 7–25 times that of pp-alkylacrylate, and the average deposition rate of pp-fluoroalkylmethacrylates was higher than 10–31 times that of pp-alkylmethacrylates, respectively. The average deposition rate of pp-film depends on the chemical structure of the monomer suggesting different mechanisms under plasma-polymerization.