Calculation of reactor impedance for helicon discharge

• Published in: IEEE transactions on plasma science Vol. 29; no. 3; pp. 502 - 511
• Main Authors: Park, B.H., Yoon, N.S., Duk-In Choi
• Format: Journal Article
• Language: English
• Published: New York, NY IEEE 01-06-2001; Institute of Electrical and Electronics Engineers; The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
• Subjects: Antenna accessories; Antennas; Boundary conditions; Devices; Discharge; Electric discharges; Electrons; Exact sciences and technology; Heating; Impedance; Inductors; Ions; Mathematical analysis; Mathematical models; Maxwell equations; Physics; Physics of gases, plasmas and electric discharges; Physics of plasmas and electric discharges; Plasma; Plasma applications; Plasma devices; Plasma interactions (nonlaser); Plasma interactions with antennas; plasma-filled waveguides; Plasma properties; Plasma sources; Reactors; Helicons; Analysis method; Maxwell Boltzmann distribution; Theoretical study; Impedance; Maxwell equations; Plasma sources; Antennas; Discharge; Calculation methods
• ISSN: 0093-3813; 1939-9375
• DOI: 10.1109/27.928948

We solve the Maxwell-Boltzmann equations and calculate reactor impedance for helicon device with the Nagoya type III antenna using a finite, width modeling of antenna current and inspect the dependence of various components of impedance on discharge parameters. The total resistance is divided into various components such as electron-ion contributions and axial-perpendicular field contributions. Moreover, the total resistance can be approximately expressed as the sum of TG and helicon contributions in a wide range of parameters.