Nature of the native-defect ESR and hydrogen-dangling-bond centers in thin diamond films

The [ital X]-band ESR of thin diamond films deposited from a mixture of 99.5% H[sub 2] and 0.5% CH[sub 4] is compared to those of films similarly prepared from D[sub 2]-CD[sub 4] and H[sub 2]-[sup 13]CH[sub 4] mixtures. Main line and satellites at [plus minus]7.2 G are unaffected by annealing at [it...

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Bibliographic Details
Published in:Physical review. B, Condensed matter Vol. 48; no. 23; pp. 17595 - 17598
Main Authors: JIA, H, SHINAR, J, LANG, D. P, PRUSKI, M
Format: Journal Article
Language:English
Published: Woodbury, NY American Physical Society 15-12-1993
American Institute of Physics
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Summary:The [ital X]-band ESR of thin diamond films deposited from a mixture of 99.5% H[sub 2] and 0.5% CH[sub 4] is compared to those of films similarly prepared from D[sub 2]-CD[sub 4] and H[sub 2]-[sup 13]CH[sub 4] mixtures. Main line and satellites at [plus minus]7.2 G are unaffected by annealing at [ital T][le]1100 [degree]C, but their intensity is reduced upon annealing at [similar to]1500 [degree]C. Since the satellites are absent from the deuterated films, they are attributed to newly identified dangling-bond H centers, possibly on internal surfaces, but more plausibly embedded in the bulk. This is consistent with the [sup 13]C relaxation rate, which indicates a uniform distribution of paramagnetic centers.
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content type line 23
W-7405-ENG-82
ISSN:0163-1829
1095-3795
DOI:10.1103/physrevb.48.17595