Highly Efficient Silicon Nanoarray Solar Cells by a Single-Step Plasma-Based Process

• Published in: Advanced energy materials Vol. 1; no. 3; pp. 373 - 376
• Main Authors: Xu, S., Huang, S. Y, Levchenko, I., Zhou, H. P., Wei, D. Y., Xiao, S. Q., Xu, L. X., Yan, W. S., Ostrikov, K.
• Format: Journal Article
• Language: English
• Published: Weinheim WILEY-VCH Verlag 01-05-2011; WILEY‐VCH Verlag; Wiley Subscription Services, Inc
• Subjects: nanocones; plasmas; solar cells
• ISSN: 1614-6832; 1614-6840
• DOI: 10.1002/aenm.201100085

Highly efficient solar cells (conversion efficiency 11.9%, fill factor 70%) based on the vertically aligned single‐crystalline nanostructures are fabricated without any pre‐fabricated p‐n junctions in a very simple, single‐step process of Si nanoarray formation by etching p‐type Si(100) wafers in low‐temperature environment‐friendly plasmas of argon and hydrogen mixtures.