Plasma Polymer Surfaces Compatible with a CMOS Process for Direct Covalent Enzyme Immobilization

• Published in: Plasma processes and polymers Vol. 6; no. 1; pp. 68 - 75
• Main Authors: Yin, Yongbai, Nosworthy, Neil J., Gong, Bill, Bax, Dan, Kondyurin, Alexy, McKenzie, David R., Bilek, Marcela M. M.
• Format: Journal Article
• Language: English
• Published: Weinheim WILEY-VCH Verlag 10-01-2009; WILEY‐VCH Verlag; Wiley-VCH
• Subjects: Applied sciences; Biological and medical sciences; Biotechnology; CMOS; Compatibility; Covalence; Devices; Enzymes; Exact sciences and technology; Fundamental and applied biological sciences. Psychology; Immobilization; Immobilization of enzymes and other molecules; immobilization of molecules; Immobilization techniques; Methods. Procedures. Technologies; Nanostructure; Physicochemistry of polymers; plasma polymerization; Polymerization; Polymers and radiations; Molecular structure; Support; Enzyme; immobilization of molecules; Immobilization; Experimental study; Glow discharge polymerization; plasma polymerization; Peroxidases; Enzymatic activity; Catalase; Storage stability; Preparation; Acetylene derivative polymer; Peroxidase; Silicon; Oxidoreductases; PECVD; Immobilized enzyme; compatibility
• ISSN: 1612-8850; 1612-8869; 1612-8869
• DOI: 10.1002/ppap.200800108

Plasma polymerized surfaces, prepared using a CMOS compatible plasma enhanced chemical vapor polymerization technique, are found to covalently immobilize enzymes without the need for intermediate chemical linker groups. The polymerized surfaces are smooth, strongly adherent to substrates, and have a long shelf life for storage. After incubation with enzymes, a densely packed monolayer is attached. We report the effects of both oxygen etching and annealing post‐processing showing that they can be implemented so as not to affect the enzyme binding performance. The fully compatible polymerization method with CMOS device manufacture processes is a potential candidate for integration into nano‐CMOS biochemical sensors for direct immobilization of enzymes.