Modeling, Design, and Verification for the Analog Front-End of a MEMS-Based Parallel Scanning-Probe Storage Device

• Published in: IEEE journal of solid-state circuits Vol. 42; no. 8; pp. 1779 - 1789
• Main Authors: Hagleitner, C.., Bonaccio, T.., Rothuizen, H.., Lienemann, J.., Wiesmann, D.., Cherubini, G.., Korvink, J.G., Eleftheriou, E..
• Format: Journal Article Conference Proceeding
• Language: English
• Published: New York, NY IEEE 01-08-2007; Institute of Electrical and Electronics Engineers; The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
• Subjects: Analog integrated circuits; Applied sciences; Arrays; Circuit simulation; Computer simulation; Design engineering; Design. Technologies. Operation analysis. Testing; Devices; Electronics; Electrostatics; Exact sciences and technology; Extraction; Finite element method; General equipment and techniques; Hardware design languages; Heating; Instruments, apparatus, components and techniques common to several branches of physics and astronomy; Integrated circuit modeling; Integrated circuits; Mathematical models; MEMS interface circuits; Micro- and nanoelectromechanical devices (mems/nems); Micromechanical devices; model-order reduction; multi domain modeling; nanotechnology; Physics; Polymer films; Probes; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices; sensor interface circuits; Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing; Silicon; Thermomechanical processes; multidomain modeling; Atomic force microscopy; sensor interface circuits; Lumped parameter circuit; Numerical method; model-order reduction; Electrical model; Modeling; Cantilever beam; Finite element method; Behavioral analysis; Microelectromechanical device; Heating element; Measurement sensor; Storage system; Polymer; Interface circuit; Indentation; Analog integrated circuits; Integrated circuit; MEMS interface circuits; Nanotechnology; Analogue integrated circuits; Scanning device; integrated circuit modeling
• ISSN: 0018-9200; 1558-173X
• DOI: 10.1109/JSSC.2007.900287

We present an integrated analog front-end (AFE) for the read-channel of a parallel scanning-probe storage device. The read/write element is based on an array of microfabricated silicon cantilevers equipped with heating elements to form nanometer-sized indentations in a polymer surface using integral atomic-force microscope (AFM) tips. An accurate cantilever model based on the combination of a thermal/electrical lumped-element model and a behavioral model of the electrostatic/mechanical part are introduced. The behavioral model of the electrostatic/mechanical part is automatically generated from a full finite-element model (FEM). The model is completely implemented in Verilog-A and was used to co-develop the integrated analog front-end circuitry together with the read/write cantilever. The cantilever model and the analog front-end were simulated together and the results were experimentally verified. The approach chosen is well suited for system-level simulation and verification/extraction in a design environment based on standard EDA tools.