Characteristics of a 3-D HTS Actuator With Various Shaped Electromagnets

• Published in: IEEE transactions on applied superconductivity Vol. 17; no. 2; pp. 2327 - 2330
• Main Authors: Kim, S.B., Inoue, T., Shimizu, A., Joo, J.H., Murase, S.
• Format: Journal Article Conference Proceeding
• Language: English
• Published: New York, NY IEEE 01-06-2007; Institute of Electrical and Electronics Engineers; The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
• Subjects: Actuator; Actuators; Applied sciences; cap core; Computer science; control theory; systems; Construction; Contamination; Control systems; Control theory. Systems; Electrical engineering. Electrical power engineering; Electrical machines; electromagnet; Electromagnets; Exact sciences and technology; Field strength; High temperature superconductors; HTS bulk; Manufacturing; Miscellaneous; Protection; Robotics; Silicon; Silicon wafers; Stators; Superconductivity; Superconductors; Transportation; Transporter; Various equipment and components; Wafers; Magnetic flux; Free field; Electromagnetism; Stator; Levitation; Two dimensional model; Clean room; cap core; Optimization; Electromagnet; Three dimensional model; HTS bulk; Wafer; High temperature superconductor; Actuator
• ISSN: 1051-8223; 1558-2515
• DOI: 10.1109/TASC.2007.898974

We have been investigating a three-dimensional (3-D) superconducting actuator using HTS bulk to develop the transportation device with non-contact and move in free space. Proposed superconducting actuator consists of the stator constructed by two-dimensional arranged electromagnets and HTS bulk superconductor as a mover. The 2-D arranged electromagnets were individually controlled to move the HTS bulk. It is expected that our proposed 3-D superconducting actuator will be useful as a transporter used in clean rooms where silicon wafers are manufactured. Wafers must be protected from contact with dust and other contamination. To realize the superconducting actuator with HTS bulks, the electromagnetic characteristics of HTS bulk, such as trapped field strength and patterns, should be clarified and the optimized controlling system is also required. Therefore, in this study, to construct the optimal 3-D actuator system, the fundamental characteristics of the levitation for HTS bulks with individually controlled four and eight-polarities electromagnets were investigated experimentally. And two kinds of cap cores attached the top of the core to improve the control ability of proposed actuator were fabricated and tested.