Fourfold rotationally symmetrically polarized laser beam for drilling a square hole

A method of laser processing with a space-variant polarized laser beam is discussed for drilling a square hole. Fourfold rotationally symmetrically polarized beams were proposed. The square-hole was formed by using the difference in the absorption of polarized light for oblique incidence. The feasib...

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Bibliographic Details
Published in:Japanese Journal of Applied Physics Vol. 55; no. 4; pp. 42701 - 42707
Main Authors: Kikuchi, Hiroshi, Mizutani, Akio, Kikuta, Hisao
Format: Journal Article
Language:English
Published: The Japan Society of Applied Physics 01-04-2016
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Summary:A method of laser processing with a space-variant polarized laser beam is discussed for drilling a square hole. Fourfold rotationally symmetrically polarized beams were proposed. The square-hole was formed by using the difference in the absorption of polarized light for oblique incidence. The feasibility of square hole drilling with the polarized beams was investigated by numerical simulations of laser processing. The calculated holes had square openings with sharp corners. Moreover, one of the square openings was about the same size as a circular hole drilled with a circularly polarized focused beam.
Bibliography:ObjectType-Article-1
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ISSN:0021-4922
1347-4065
DOI:10.7567/JJAP.55.042701