High-speed deposition of oriented orthorhombic NaTaO3 films using laser chemical vapor deposition
We demonstrated the high-speed laser chemical vapor deposition of orthorhombic NaTaO3 (o-NaTaO3) films. The orientation of the o-NaTaO3 films was changed from (101) to (112) to (001) plane as the increase of deposition temperature from 823 to 913K. o-NaTaO3 films had faceted surfaces and columnar cr...
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| Published in: | Materials letters Vol. 184; pp. 257 - 260 |
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| Main Authors: | , , , , , |
| Format: | Journal Article |
| Language: | English |
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01-12-2016
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| Abstract | We demonstrated the high-speed laser chemical vapor deposition of orthorhombic NaTaO3 (o-NaTaO3) films. The orientation of the o-NaTaO3 films was changed from (101) to (112) to (001) plane as the increase of deposition temperature from 823 to 913K. o-NaTaO3 films had faceted surfaces and columnar cross sections. The deposition rates of o-NaTaO3 films were 48–120µmh−1, which are 192–6000 times higher than those offered by wet-chemical routes.
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•NaTaO3 thick films were first prepared by chemical vapor deposition route.•Orientation of orthorhombic NaTaO3 films changed from (101) to (112) to (001).•NaTaO3 films were composed of columnar grains.•Facet structures were associated with orientations.•Deposition rates of NaTaO3 films reached 120µmh−1. |
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| AbstractList | We demonstrated the high-speed laser chemical vapor deposition of orthorhombic NaTaO3 (o-NaTaO3) films. The orientation of the o-NaTaO3 films was changed from (101) to (112) to (001) plane as the increase of deposition temperature from 823 to 913K. o-NaTaO3 films had faceted surfaces and columnar cross sections. The deposition rates of o-NaTaO3 films were 48-120 mu mh-1, which are 192-6000 times higher than those offered by wet-chemical routes. We demonstrated the high-speed laser chemical vapor deposition of orthorhombic NaTaO3 (o-NaTaO3) films. The orientation of the o-NaTaO3 films was changed from (101) to (112) to (001) plane as the increase of deposition temperature from 823 to 913K. o-NaTaO3 films had faceted surfaces and columnar cross sections. The deposition rates of o-NaTaO3 films were 48–120µmh−1, which are 192–6000 times higher than those offered by wet-chemical routes. [Display omitted] •NaTaO3 thick films were first prepared by chemical vapor deposition route.•Orientation of orthorhombic NaTaO3 films changed from (101) to (112) to (001).•NaTaO3 films were composed of columnar grains.•Facet structures were associated with orientations.•Deposition rates of NaTaO3 films reached 120µmh−1. |
| Author | Huerta-Flores, Ali M. Goto, Takashi Ito, Akihiko Moctezuma, Edgar Torres-Martínez, Leticia M. Chen, Jianchao |
| Author_xml | – sequence: 1 givenname: Ali M. surname: Huerta-Flores fullname: Huerta-Flores, Ali M. organization: Facultad de Ciencias Químicas, Universidad Autónoma de San Luis Potosí, San Luis Potosí 78290, Mexico – sequence: 2 givenname: Jianchao surname: Chen fullname: Chen, Jianchao organization: Institute for Materials Research, Tohoku University, Sendai 980-8577, Japan – sequence: 3 givenname: Akihiko surname: Ito fullname: Ito, Akihiko email: ito-akihiko-xr@ynu.ac.jp organization: Institute for Materials Research, Tohoku University, Sendai 980-8577, Japan – sequence: 4 givenname: Leticia M. surname: Torres-Martínez fullname: Torres-Martínez, Leticia M. organization: Universidad Autónoma de Nuevo León, Facultad de Ingeniería Civil, Departamento de Ecomateriales y Energía, Nuevo León 66455, Mexico – sequence: 5 givenname: Edgar surname: Moctezuma fullname: Moctezuma, Edgar organization: Facultad de Ciencias Químicas, Universidad Autónoma de San Luis Potosí, San Luis Potosí 78290, Mexico – sequence: 6 givenname: Takashi surname: Goto fullname: Goto, Takashi organization: Institute for Materials Research, Tohoku University, Sendai 980-8577, Japan |
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| CitedBy_id | crossref_primary_10_1002_ente_201900819 crossref_primary_10_1016_j_matlet_2019_126817 crossref_primary_10_1039_C9SE00526A crossref_primary_10_3390_nano12061012 crossref_primary_10_1021_acs_jpcc_2c08986 crossref_primary_10_1016_j_matpr_2017_09_029 |
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| Snippet | We demonstrated the high-speed laser chemical vapor deposition of orthorhombic NaTaO3 (o-NaTaO3) films. The orientation of the o-NaTaO3 films was changed from... |
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| SubjectTerms | Chemical vapor deposition Cross sections Deposition High speed Laser chemical vapor deposition Lasers Orientation Oriented growth Orthorhombic NaTaO3 Planes |
| Title | High-speed deposition of oriented orthorhombic NaTaO3 films using laser chemical vapor deposition |
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