High-speed deposition of oriented orthorhombic NaTaO3 films using laser chemical vapor deposition

• Published in: Materials letters Vol. 184; pp. 257 - 260
• Main Authors: Huerta-Flores, Ali M., Chen, Jianchao, Ito, Akihiko, Torres-Martínez, Leticia M., Moctezuma, Edgar, Goto, Takashi
• Format: Journal Article
• Language: English
• Published: Elsevier B.V 01-12-2016
• Subjects: Chemical vapor deposition; Cross sections; Deposition; High speed; Laser chemical vapor deposition; Lasers; Orientation; Oriented growth; Orthorhombic NaTaO3; Planes; Orthorhombic NaTaO3; Laser chemical vapor deposition; Oriented growth
• ISSN: 0167-577X; 1873-4979
• DOI: 10.1016/j.matlet.2016.08.083

We demonstrated the high-speed laser chemical vapor deposition of orthorhombic NaTaO3 (o-NaTaO3) films. The orientation of the o-NaTaO3 films was changed from (101) to (112) to (001) plane as the increase of deposition temperature from 823 to 913K. o-NaTaO3 films had faceted surfaces and columnar cross sections. The deposition rates of o-NaTaO3 films were 48–120µmh−1, which are 192–6000 times higher than those offered by wet-chemical routes.
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•NaTaO3 thick films were first prepared by chemical vapor deposition route.•Orientation of orthorhombic NaTaO3 films changed from (101) to (112) to (001).•NaTaO3 films were composed of columnar grains.•Facet structures were associated with orientations.•Deposition rates of NaTaO3 films reached 120µmh−1.