Growth of beta barium borate (β-BaB 2O 4) thin films by injection metal organic chemical vapour deposition
Thin films containing beta barium borate (β-BaB 2O 4 so called β-BBO) were grown on silicon (100) substrates by injection metal organic chemical vapour deposition for different deposition temperatures. The films were characterized by optical microscopy, micro-Raman spectroscopy and X-ray photoelectr...
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| Published in: | Thin solid films Vol. 515; no. 16; pp. 6507 - 6511 |
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04-06-2007
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| Abstract | Thin films containing beta barium borate (β-BaB
2O
4 so called β-BBO) were grown on silicon (100) substrates by injection metal organic chemical vapour deposition for different deposition temperatures. The films were characterized by optical microscopy, micro-Raman spectroscopy and X-ray photoelectron Spectroscopy (XPS). The micro-Raman spectra show an intense peak at 637 cm
−
1
that is the fingerprint of β-BBO. Our XPS analysis permits the measurement of the Ba, B and O core levels, which are reported here for the first time for β-BBO thin films. The formation of a new spectral component appearing with lower growth temperatures has been observed as well. |
|---|---|
| AbstractList | Thin films containing beta barium borate (β-BaB
2O
4 so called β-BBO) were grown on silicon (100) substrates by injection metal organic chemical vapour deposition for different deposition temperatures. The films were characterized by optical microscopy, micro-Raman spectroscopy and X-ray photoelectron Spectroscopy (XPS). The micro-Raman spectra show an intense peak at 637 cm
−
1
that is the fingerprint of β-BBO. Our XPS analysis permits the measurement of the Ba, B and O core levels, which are reported here for the first time for β-BBO thin films. The formation of a new spectral component appearing with lower growth temperatures has been observed as well. Thin films containing beta barium borate (β-BaB2O4 so called β-BBO) were grown on silicon (100) substrates by injection metal organic chemical vapour deposition for different deposition temperatures. The films were characterized by optical microscopy, micro-Raman spectroscopy and X-ray photoelectron Spectroscopy (XPS). The micro-Raman spectra show an intense peak at 637 cm− 1 that is the fingerprint of β-BBO. Our XPS analysis permits the measurement of the Ba, B and O core levels, which are reported here for the first time for β-BBO thin films. The formation of a new spectral component appearing with lower growth temperatures has been observed as well. |
| Author | Thévenin, P. Orsal, G. Wersand-Quell, S. Bath, A. |
| Author_xml | – sequence: 1 givenname: S. surname: Wersand-Quell fullname: Wersand-Quell, S. email: quell@metz.supelec.fr – sequence: 2 givenname: G. surname: Orsal fullname: Orsal, G. email: orsal@metz.supelec.fr – sequence: 3 givenname: P. surname: Thévenin fullname: Thévenin, P. email: thevenin@metz.supelec.fr – sequence: 4 givenname: A. surname: Bath fullname: Bath, A. email: bath@metz.supelec.fr |
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| Keywords | CVD Injection-MOCVD β-BBO Thin film growth Borates Temperature dependence Barium Organometallic compounds Core levels Raman spectroscopy MOCVD Film growth Thin films Metallic thin films Optical microscopy Growth mechanism X-ray photoelectron spectra |
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| Snippet | Thin films containing beta barium borate (β-BaB
2O
4 so called β-BBO) were grown on silicon (100) substrates by injection metal organic chemical vapour... Thin films containing beta barium borate (β-BaB2O4 so called β-BBO) were grown on silicon (100) substrates by injection metal organic chemical vapour... |
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| SubjectTerms | Borates Chemical vapor deposition (including plasma-enhanced cvd, mocvd, etc.) Cross-disciplinary physics: materials science; rheology CVD Exact sciences and technology Injection-MOCVD Materials science Methods of deposition of films and coatings; film growth and epitaxy Optics Physics Theory and models of film growth Thin film growth β-BBO |
| Title | Growth of beta barium borate (β-BaB 2O 4) thin films by injection metal organic chemical vapour deposition |
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