Structure and mechanical properties of Ag-incorporated DLC films prepared by a hybrid ion beam deposition system

• Published in: Thin solid films Vol. 516; no. 2; pp. 248 - 251
• Main Authors: Choi, Heon Woong, Choi, Jung-Hae, Lee, Kwang-Ryeol, Ahn, Jae-Pyoung, Oh, Kyu Hwan
• Format: Journal Article Conference Proceeding
• Language: English
• Published: Lausanne Elsevier B.V 03-12-2007; Elsevier Science
• Subjects: Ag incorporation; Bond structure; Composition and phase identification; Condensed matter: structure, mechanical and thermal properties; Cross-disciplinary physics: materials science; rheology; Diamond-like carbon (DLC); Exact sciences and technology; Fullerenes and related materials; diamonds, graphite; Hybrid ion beam deposition; Ion and electron beam-assisted deposition; ion plating; Materials science; Mechanical and acoustical properties; Mechanical properties; Methods of deposition of films and coatings; film growth and epitaxy; Microstructure; Physical properties of thin films, nonelectronic; Physics; Specific materials; Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties); Thin film structure and morphology; Mechanical properties; Bond structure; Hybrid ion beam deposition; Diamond-like carbon (DLC); Microstructure; Ag incorporation; Diamond-like carbon; Silver additions; Residual stresses; Ion beam assisted deposition method; Hardness; Thin films; Compressive stress; Benzene; Physical vapor deposition; Chemical composition
• ISSN: 0040-6090; 1879-2731
• DOI: 10.1016/j.tsf.2007.06.154

Ag-incorporated diamond-like carbon films were prepared on Si(100) wafers using a hybrid deposition system composed of an end-Hall-type hydrocarbon ion gun and a silver DC magnetron sputter source. The Ag concentration in the films was controlled by changing the fraction of Ar in the Ar and benzene reaction gas. The chemical composition, microstructure, atomic bond structure, and mechanical properties were investigated for Ag concentrations ranging from 0 to 9.7
at.%. When the Ag concentration was 0.1
at.%, the Ag atoms were fully dissolved in the amorphous carbon matrix without forming any second phase. Amorphous and crystalline silver particles appeared when the Ag concentration was 1.7 and >
6.8
at.%, respectively. It was found that the hardness was not sensitive to the Ag concentration in this concentration range. On the other hand, the residual compressive stress was strongly dependent on the chemical state of the incorporated Ag atoms. The mechanical properties are discussed in terms of the changes in the microstructure and atomic bond structure induced by Ag incorporation.