THz MEMS Switch Design

THz MEMS Switch Design

In this work, an mm-wave/THz MEMS switch design process is presented. The challenges and solutions associated with the switch electrical design, modeling, fabrication, and test are explored and discussed. To investigate the feasibility of this design process, the switches are designed on both silico...

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Bibliographic Details
Published in:Micromachines (Basel) Vol. 13; no. 5; p. 745
Main Authors: Feng, Yukang, Tsao, Han-Yu, Barker, N Scott
Format: Journal Article
Language:English
Published: Switzerland MDPI AG 08-05-2022
MDPI
Subjects:
Design
Electric fields
Frequency ranges
Fused quartz
Insertion loss
MEMS
Millimeter waves
millimeter-wave
Silica
Silicon
Silicon substrates
switch
Switches
terahertz
transmission line model
MEMS
millimeter-wave
terahertz
switch
transmission line model
Online Access:Get full text
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Description
Summary:In this work, an mm-wave/THz MEMS switch design process is presented. The challenges and solutions associated with the switch electrical design, modeling, fabrication, and test are explored and discussed. To investigate the feasibility of this design process, the switches are designed on both silicon and fused quartz substrate and then tested in the 140-750 GHz frequency range. The measurement fits design expectations and simulation well. At 750 GHz the measurement results from switches on both substrates have an ON state insertion loss of less than 3 dB and an OFF state isolation larger than 12 dB.
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content type line 23
ISSN:2072-666X
2072-666X
DOI:10.3390/mi13050745